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1 Introduction, 2 Materials for Microdevices, 3 Standard Microelectronic Technologies, 4 Silicon Micromachining Techniques, 5 MEMS Processing Techniques, 6 Multifunctional Polymer Processing Techniques, 7 Batch Fabrication, Photoforming and Assembly of Microdevices, 8 Integrating Microelectronics and MEMS, 9 Design, Modelling and Simulation of Microdevices, 10 Microsensors and Microactuators, 11 Smart Devices, 12 MEMS and Smart Structures, Appendices.