Table of contents for VLSI fabrication principles : silicon and gallium arsenide / Sorab K. Ghandhi.


Bibliographic record and links to related information available from the Library of Congress catalog


Information from electronic data provided by the publisher. May be incomplete or contain other coding.


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Material Properties.
Phase Diagrams and Solid Solubility.
Crystal Growth and Doping.
Diffusion.
Epitaxy.
Ion Implantation.
Native Films.
Deposited Films.
Etching and Cleaning.
Lithographic Processes.
Device and Circuit Fabrication.
Appendix.
Index.


Library of Congress subject headings for this publication: Integrated circuits Very large scale integration, Silicon, Gallium arsenide