Table of contents for Microchip fabrication : a practical guide to semiconductor processing / Peter Van Zant.


Bibliographic record and links to related information available from the Library of Congress catalog


Information from electronic data provided by the publisher. May be incomplete or contain other coding.


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The Semiconductor Industry
International Technology Roadmap for Semiconductors
Semiconductor Materials and Process Chemicals
Manufacturing Wafers
Overview of Wafer Fabrication
300mm wafer diameter processing
Contamination Control
Process Yields
Nanotechnology Processes
Oxidation
Basic Patterning -- Surface Preparation to Exposure
Basic Patterning -- Developing to Final Inspection
Advanced Photolithography Processes
Doping
Deposition of Dielectrics and Semiconductor Layers
Metalization: Wiring the Chip Composites
Process and Device Evaluation
The Business of Water Fabrication
Green Processing
Semiconductor Devices and Integrated Circuit Formation
Nanotechnology Devices
Integrated Circuit Types
Packaging
GLOSSARY



Library of Congress subject headings for this publication: Semiconductors Design and construction, Integrated circuits Design and construction