Bibliographic record and links to related information available from the Library of Congress catalog.
Note: Electronic data is machine generated. May be incomplete or contain other coding.
1 Basic Concepts and Technologies 1 1.1 New Flow Regimes in MEMS ............ .. ... 1 1.2 The Continuum Hypothesis ........ ......... 7 1.2.1 Molecular Magnitudes ................. 11 1.2.2 Mixed Flow Regimes ..................... 16 1.2.3 Experimental Evidence . ...... ......... 17 1.3 The Pioneers ......... ............... . 21 1.4 Full-System Simulation of MEMS ............... 24 1.5 Modeling of Micro Flows ........ ............ 31 2 Governing Equations and Slip Models 39 2.1 The Basic Equations of Fluid Dynamics ........... 39 2.1.1 Incompressible Flow .... ................... 42 2.1.2 Reduced Models ............... 44 2.2 Compressible Flow ....... ............... 45 2.2.1 First-Order Models . .... .. ...... 47 2.2.2 The Role of the Accommodation Coefficients .... 49 2.3 High-Order Models ...................... 53 2.3.1 Derivation of High-Order Slip Models .... ... 54 2.3.2 General Slip Condition ............... .. 57 2.3.3 Comparison of Slip Models .............. 61 3 Shear-Driven and Separated Micro Flows 63 3.1 Couette Flow .... ............... ....... 63 3.2 Cavity Flow ............ ..... ............ 67 3.3 Grooved Channel Flow .......... ......... 68 3.4 Separated Internal Flows .................... 71 3.4.1 Validation of Slip Models with DSMC ........ 77 3.5 Separated External Flows ................... 83 4 Pressure-Driven Micro Flows: Slip Flow Regime 87 4.1 Isothermal Compressible Flows ................ 87 4.2 Adiabatic Compressible Flows - Fanno Theory ....... 95 4.3 Inlet Flows .......................... 101 4.4 Validation of Slip Models with DSMC ............ 102 4.5 Effects of Roughness ............... ....... 108 5 Pressue-Driven Micro Flows: Transition and Free-Molecular Regimes 113 5.1 Transition and Free-Molecular Flow Regimes ....... 113 5.2 Burnett Equations in Micro Channels .... ....... 117 5.3 A Unified Flow Model ............ ....... 119 5.3.1 Velocity Scaling.................... 119 5.3.2 Flowrate Scaling ........... ......... 122 5.3.3 Model for Pipe and Duct Flows ............ 127 6 Thermal Effects in Micro Scales 139 6.1 Thermal Creep (Transpiration) ..... ....... 139 6.1.1 Simulation Results ................... 141 6.1.2 A Thermal Creep Experiment .. ...... .. 145 6.1.3 Knudsen Compressors ................. 146 6.1.4 Other Temperature-Induced Flows .......... 147 6.1.5 Heat Conduction and the Ghost Effect ........ 149 6.2 Heat Transfer in Micro Poiseuille Flows ........... 151 6.3 Heat Transfer in Micro Couette Flows ............ 158 7 Prototype Applications of Gas Micro Flows 163 7.1 Gas Damping and Dynamic Response of MEMS ...... 163 7.1.1 Reynolds Equation ................... 166 7.1.2 Squeezed Film Effects in Accelerometers ....... 173 7.2 Micro Propulsion and Micro Nozzle Flows ......... 178 7.2.1 Micro Propulsion Analysis .... .......... 180 7.2.2 Rarefaction and Other Effects ............ . 184 8 Electrokinetically Driven Liquid Micro Flows 193 8.1 Electrokinetic Effects - Review ....... ...... 194 8.2 The Electric Double Layer ................... 195 8.3 Near-Wall Potential Distribution . ............. 197 8.4 Governing Equations for Electroosmotic Flows ....... 199 8.4.1 Numerical Formulation and Validation ........ 200 8.5 Electrokinetic Micro Channel Flows . ..... ..... . 202 8.6 EDL/Bulk Flow Interface Velocity Matching Condition . ................ .... . 207 8.7 Electroosmotic Slip Condition . ............. 208 8.7.1 Approximate Evaluation of Drag Force due to Electroosmotic Effects ................. 209 8.8 Complex Geometry Flows . ..................... 210 8.8.1 Cross-Flow Junctions ................. 211 8.8.2 Array of Circular and Square Posts .......... 213 8.9 Dielectrophoresis . ....................... 215 9 Numerical Methods for Continuum Simulation 223 9.1 A High-Order Numerical Method: The Flow Code ... . 224 9.1.1 Formulation for Incompressible Micro Flows ..... 228 9.1.2 Formulation for Compressible Micro Flows ..... 231 9.1.3 Implementation of Slip Boundary Conditions ... 236 9.1.4 Validation Problems .................. 237 9.2 A Meshless Numerical Method . .................. 239 9.3 The Force Coupling Method for Particulate Micro Flows .................. . ........ 246 10 Numerical Methods for Atomistic Simulation 257 10.1 Molecular Dynamics (MD) Method ............ .. 257 10.1.1 MD-Continumm Coupling ....... ....... 263 10.2 Direct Simulation Monte Carlo (DSMC) Method ..... 266 10.2.1 Limitations and Errors in DSMC ........... 269 10.2.2 DSMC-Information Preservation Method ..... . 274 10.2.3 DSMC-Continuum Coupling ............. 275 10.3 The Boltzmann Equation ................... 279 10.3.1 General Theory ............. ....... . 279 10.3.2 Classical Solutions of Boltzmann Equation ..... 284 10.3.3 Sone's Asymptotic Theory of Boltzmann Equation .............. 288 10.3.4 Numerical Solutions of Boltzmann Equation ..... 297 10.3.5 Non-Isothermal Flows ................ . 301 10.4 Lattice-Boltzmann Method (LBM) ............. . 303 10.4.1 Comparison with Navier-Stokes Solution ...... 306 10.4.2 LBM Simulation of Micro Flows ........... 308 Bibliography 311 Index 335