Publisher description for Microelectronic applications of chemical mechanical planarization / edited by Yuzhuo Li.


Bibliographic record and links to related information available from the Library of Congress catalog


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Microelectronic Applications Using Chemical Mechanical Planarization provides a systematic and comprehensive description of current CMP technology used in high-tech products such as video games, portable communications devices, and high-speed computers. It covers includes new designs, capabilities, and emerging technologies, including topics like CMP with nanomaterials and technologies like MEMS (Micro-Electro-Mechanical Systems). It also covers fundamentals and basic science, making it an ideal introduction for CMP newcomers and a valuable reference for professionals.


Library of Congress subject headings for this publication:
Integrated circuits -- Design and construction.
Chemical mechanical planarization.
Microelectronics -- Materials.