Publisher description for Microelectronic applications of chemical mechanical planarization / edited by Yuzhuo Li.
Bibliographic record and links to related information available from the Library of Congress catalog
Information from electronic data provided by the publisher. May be incomplete or contain other coding.
Microelectronic Applications Using Chemical Mechanical Planarization provides a systematic and comprehensive description of current CMP technology used in high-tech products such as video games, portable communications devices, and high-speed computers. It covers includes new designs, capabilities, and emerging technologies, including topics like CMP with nanomaterials and technologies like MEMS (Micro-Electro-Mechanical Systems). It also covers fundamentals and basic science, making it an ideal introduction for CMP newcomers and a valuable reference for professionals.
Library of Congress subject headings for this publication:
Integrated circuits -- Design and construction.
Chemical mechanical planarization.
Microelectronics -- Materials.