Publisher description for Fundamentals of semiconductor fabrication / Gary S. May, Simon M. Sze.


Bibliographic record and links to related information available from the Library of Congress catalog


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Counter Offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence Presents comprehensive coverage of process sequences Introduces readers to modern simulation tools Addresses the practical aspects of integrated circuit fabrication Clearly explains basic processing theory

Library of Congress subject headings for this publication: Semiconductors Design and construction, Integrated circuits