Publisher description for Semiconductor devices, physics and technology / S.M. Sze.
Bibliographic record and links to related information available from the Library of Congress catalog
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This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
Library of Congress subject headings for this publication: Semiconductors